http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05279184-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02 |
| filingDate | 1992-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1993-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05279184-A |
| titleOfInvention | Diamond synthesis method |
| abstract | (57) [Abstract] [Purpose] It is possible to selectively remove graphite carbon precipitated at the same time by the CVD method by activated hydrogen or oxygen by the low temperature synthesis photo CVD method, and other than the photo CVD method. It is also possible to obtain high film quality diamond by using oxygen in the above method. [Structure] Gaseous carbon compound is mixed with hydrogen or oxygen, and light for decomposing the carbon compound and light corresponding to Raman transition of hydrogen or oxygen converted therefrom are irradiated, Simultaneously with the synthesis of diamond, it is etched by activated hydrogen or oxygen of diamond carbon. Alternatively, photo CVD using activated oxygen generated by thermal decomposition of ozone Etching of diamond carbon is also performed by a CVD method other than the above method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011064616-A |
| priorityDate | 1992-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.