http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05273757-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-12 |
| filingDate | 1992-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1993-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05273757-A |
| titleOfInvention | Novolac resin composition for photoresist having high glass transition point and high photosensitivity |
| abstract | (57) [Summary] [Object] To provide a novolac resin composition for photoresists having high Tg and high photosensitivity. A composition comprising about 30 mol% to about 98 mol% of metacresol, about 1 mol% to about 40 mol% of 3,5-dimethylphenol, and about 1 mol% to about 10 mol% of A novolak resin composition which is insoluble in water and soluble in aqueous alkali, which is obtained by condensing a mixture of substituted or unsubstituted polyhydric hydroxyphenols represented by the general formula Law. [Chemical 1] Here, R is hydrogen or C 1 to C 5 lower alkyl, and n is 1 to 3. [Effect] The above object is achieved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017175589-A1 |
| priorityDate | 1991-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 95.