http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05265209-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F299-00 |
| filingDate | 1992-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1993-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05265209-A |
| titleOfInvention | Radiation-sensitive polymer compound |
| abstract | (57) [Summary] [Structure] The present invention includes a structure in which an aminomethyl group is bonded to an aromatic ring as a terminal of a side chain and a phenol structure, and the ratio of both is an aromatic ring as a terminal of the side chain. The structure in which aminomethyl group is bonded to: 1 to 90, phenol structure: 10 to 99, weight average molecular weight 500 to 1, It is a radiation sensitive polymer of, 000,000. [Effects] This polymer compound is used for ultraviolet rays, far ultraviolet rays, X Since it provides high sensitivity and high resolution to radiation such as rays, electron beams, and ion beams, it can be used as a resist for manufacturing integrated circuits. |
| priorityDate | 1992-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.