http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05259523-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24 |
| filingDate | 1992-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1993-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05259523-A |
| titleOfInvention | Superconducting circuit manufacturing method |
| abstract | (57) [Abstract] [Purpose] To provide a method capable of easily and precisely manufacturing a superconducting circuit having excellent electric characteristics. [Structure] A plurality of layers made of different materials are formed on a substrate surface, a circuit pattern is transferred to the outermost layer, and the plurality of layers are sequentially etched from the upper layer to form a circuit pattern on the substrate surface. A feature is that a superconducting film is formed on the pattern portion. [Effect] The superconducting circuit board can be manufactured easily and precisely without causing processing damage to the superconducting circuit and preventing deterioration of the superconducting film due to moisture or the like. |
| priorityDate | 1992-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547108 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6384 |
Total number of triples: 10.