http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0525661-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95585944cd76ddfb6dc33ed2a0b84403 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 1991-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f45e956cea4bf50ca7fac3ade74f953 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cf02a6dabac32fd22e67d2d892bddd6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35ae2d46bee06dcea8204ccb24706def |
| publicationDate | 1993-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0525661-A |
| titleOfInvention | Substrate automatic processing apparatus and automatic processing method |
| abstract | (57) [Summary] [Object] To provide an automatic processing apparatus and an automatic processing method for a substrate, which eliminates contamination by a cassette that accommodates the substrate and can perform a continuity inspection and an electrolytic treatment of the substrate as necessary. An automatic substrate processing apparatus includes a substrate holder 21 having a cassette 11 for accommodating a plurality of substrates 1 and a plurality of chucks 22 for respectively retaining the plurality of substrates 1 accommodated in the cassette 11, Driving means for driving the substrate holding unit 21 to take out or store the substrate 1 from the cassette 11, convey the substrate 1, soak or pull up the substrate 1 in the processing bath unit 30, and hold the substrate 1 in the processing bath unit 30. And 20. Also, cassette 1 The cassettes 11 are provided on the sides of the plurality of substrates 1 housed in the cassette 1. An alignment mechanism 15 for vertically arranging the substrates 1 therein is provided. Further, if necessary, when the substrate 1 is clamped by the chuck 11, a continuity inspection mechanism for contacting the detection terminal of the conductive electrode formed on the substrate 1 and inspecting the electrode for disconnection or short circuit is provided with a clamping surface of the chuck 11. To be installed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6104006-A |
| priorityDate | 1990-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.