abstract |
(57) Abstract: The present invention proposes a cooling structure that directly transfers heat between an active layer and a heat sink in a chip in which an electronic device is formed. A cooling structure 30 of the present invention includes a metal structure 43, 44, 45 and an insulating spacer 46 which are partially covered by an insulating layer 471 and then covered by a heat transfer structure 48. 1, 462, 463, 464 and / or a current / voltage supply level 34 with an insulating layer. Thermal connection of heat transfer bridge 251 to heat transfer structure 48 provides heat flow between the cooling structure and heat sink of the present invention. |