| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1992-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94ff88256420806c097fce0b9d2dfe37 |
| publicationDate |
1993-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H05234987-A |
| titleOfInvention |
Method for forming fluororesin film |
| abstract |
(57) [Summary] [Object] The present invention relates to a method for forming a fluororesin film, An object of the present invention is to provide a method capable of improving the heat resistance and dielectric constant of a film directly formed on a substrate by a plasma polymerization method. [Structure] Ions effective for chemical reaction with mixed carbon radicals or ions are injected into the formed fluororesin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6720659-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6773762-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6531409-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1035568-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1035568-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9957760-A1 |
| priorityDate |
1992-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |