http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05224407-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1992-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82d2e7bd7d775c3e6365dd10d40840a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4eb526dd1ede469835cc80c2e01abf2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e8c6788d846774f20e5ac920e2e11e3 |
| publicationDate | 1993-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05224407-A |
| titleOfInvention | Positive photoresist composition |
| abstract | (57) [Summary] [Object] To provide a positive photoresist composition capable of obtaining a resist pattern having high sensitivity and excellent in resolution, developability and heat resistance particularly in the production of semiconductor devices and the like. A positive photoresist composition comprises an alkali-soluble resin, a quinonediazide compound and the following general formula (I): It contains a compound represented by. [Chemical 1] Here, R 1 : hydrogen atom, halogen atom, hydroxyl group, alkyl group, alkoxy group, alkenyl group, aryl group, arylcarbonyl group, acyloxy group, acetoxy group, acyl group, or alloxyl group, R 2 : hydrogen atom, halogen Represents an atom, a hydroxyl group, an alkyl group, or a carboxyl group, m: an integer of 1 to 4, and n: an integer of 1 to 4. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8647807-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8647806-B2 |
| priorityDate | 1992-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 254.