http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05197152-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c24684033fba97d1ad845ce453a57e3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1992-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b006ac2520a807e9f093c7868666c432 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9348236f67cab3b23ab7d5fb79974715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_771151fc451d0b8ee36546291336bf94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd184fe5577a7d16c17388ced55239aa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37c30f3785f016d6b26c49a6b6f3f666 |
| publicationDate | 1993-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05197152-A |
| titleOfInvention | Positive-type radiation-sensitive mixture, and radiation-sensitive recording material produced using this mixture |
| abstract | (57) [Summary] (Modified) [Purpose] Radiation-sensitive mixture produced by using a radiation-sensitive mixture that exhibits high resolution, high sensitivity, high thermal stability and does not produce corrosive photolysis products on exposure. Provide recording material. [Structure] a) a compound which generates a strong acid under the action of actinic radiation, b) at least one C—O—C which can be cleaved by an acid Or a positive radiation-sensitive mixture having a compound having a C—O—Si bond and c) a polymeric binder that is insoluble in water and soluble or at least swellable in an aqueous alkaline solution, the compound (a) 1 which is substituted by a group R 'on the formula R-SO 3 H in is esterified with a sulfonic acid 1,3,5 or 1,2,4-trihydroxybenzene or aromatic ring, 2,3-, 1,3,5- or 1,2,4-trihydroxybenzene, wherein R and R'have the same or different definitions and R is a (C 1 -C 10 ) alkyl group etc., R 'is either one of the groups given in R (C 1 ~C 10) alkanoyl group]. |
| priorityDate | 1991-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 195.