http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05193134-A

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filingDate 1992-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94135d7996a3107065c470bdf602bbef
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publicationDate 1993-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H05193134-A
titleOfInvention Inkjet print head
abstract (57) [Summary] (Corrected) [Purpose] An inkjet printhead having an integral silicon filter on the ink inlet. A channel wafer is orientation dependent etched from one side of a silicon wafer through a patterned etch resistant masking layer to provide a plurality of reservoir recesses 24 each having a predetermined depth and floor thickness, and , Multiple sets of parallel ink channel grooves 20 such that there is one set of channel grooves 20 for each reservoir recess 24. The etch resistant masking layer on both sides of the channel wafer is removed and a second etch resistant masking layer is deposited thereon. The second mask layer is patterned on the side opposite the side having the channel grooves 20 and the reservoir recesses 24 to create a plurality of patterns of filter narrow passages that align with the bottom of the reservoir recesses 24. The printhead filter is made by a second orientation dependent etching step of the channel wafer prior to bonding with the heater wafer.
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