| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate |
1992-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_898d9cdec7941981ae97c0c2519bd8e0 |
| publicationDate |
1993-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H05188308-A |
| titleOfInvention |
Spatial light modulator and its manufacturing method |
| abstract |
(57) [Summary] [Object] An object of the present invention is to propose a spatial light modulator having a flexible beam having a novel structure and a manufacturing method thereof. [Structure] 4 on the cylindrical support pillar that is opened upright on the board The two elements are hingedly joined in a crowbar shape. Each of the elements is deformed according to the voltage applied between the substrate and the element, thereby modulating the input light. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6271955-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5999306-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100947145-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6107115-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6452712-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6650461-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6891654-B2 |
| priorityDate |
1984-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |