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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C291-04
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C291-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-675
filingDate 1991-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfae59e959d199a8d35045973e8bd022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_234f320334f9a97fe9e39a3fe7148a86
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publicationDate 1993-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H05155842-A
titleOfInvention α- [p- (dimethylamino) phenyl-N- (alkylphenyl) nitrone compound and photobleaching material
abstract (57) [Summary] [Objective] To obtain a nitrone compound useful as a main component of a photobleaching material for contrast enhancement capable of forming a fine resist pattern. [Structure] α- [p- (dimethylamino) phenyl] -N- (alkylphenyl) represented by the following general formula (1) Nitron compound. [Chemical 1] (In the formula, R 1 , R 2 , R 3 , R 4 and R 5 are the same or different alkyl groups or hydrogen atoms, and at least one is an alkyl group.)
priorityDate 1991-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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