http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05154466-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa90351c4772288eaa6e57d2ea3f80ae |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-46 |
| filingDate | 1991-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_484b4471bd3fef749c1b512da5b80d00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7d7ec42fdb2b794fb1ef7a30061f94e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d1089cc6ff7d17c0500a00b379cb818 |
| publicationDate | 1993-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05154466-A |
| titleOfInvention | Method of recovering and reusing nitric acid from silicon processing waste liquid |
| abstract | (57) [Summary] [Objective] To provide a method for recovering and reusing nitric acid from a silicon treatment waste liquid. [Structure] When recovering nitric acid by distilling a silicon treatment waste liquid containing nitric acid and hydrofluoric acid as a main component and a soluble silicon compound, the silicon dioxide deposited in the cooling condensing part is dissolved and removed with hydrofluoric acid to distill the nitric acid. to recover. Further, it is characterized in that the recovered nitric acid is mixed with the silicon treatment liquid and reused. [Effect] When recovering nitric acid by distilling a silicon treatment liquid, it was difficult to recover nitric acid because the distillation system was conventionally blocked. However, the above method eliminates the blockage of the distillation system. The nitric acid can be recovered efficiently. Further, the concentration of impurities in the recovered nitric acid is significantly lower than that of commercial products, and high-purity nitric acid can be obtained. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008057043-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4646251-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112957758-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005169191-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100831060-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7922876-B2 |
| priorityDate | 1991-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.