| abstract |
(57) [Summary] (Corrected) [Purpose] Oxygen contained in gases such as nitrogen, argon, and hydrogen containing hydride gas is measured with high accuracy such as 0.01 ppm level. [Structure] A gas containing a hydride gas is brought into contact with an adsorbent 7 capable of adsorbing the hydride gas, and then a high-sensitivity oxygen analyzer 1 such as a yellow phosphorus luminescence type or a galvanic cell type 1 2 and measure the oxygen concentration. |