http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05136240-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-311 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1991-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18fe848427f5083ab5d35f0144e2723a |
| publicationDate | 1993-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05136240-A |
| titleOfInvention | OBIC observation method and apparatus |
| abstract | (57) [Abstract] [Purpose] To enable OBIC observation of high-density devices where most of the semiconductor chip surface is covered with metal wiring. [Structure] For a silicon semiconductor device, the depth of light penetration, that is, the depth at which silicon absorbs light (the depth required for light to generate the photovoltaic effect) is deeper than the thickness of the silicon chip. An OBIC current is measured by irradiating a light beam having a wavelength, for example, a YAG laser having a wavelength of 1064 nm or a HeNe laser having a wavelength of 1152 nm from the back surface side of the silicon chip. [Effect] OBIC observation of the pn junction portion in the region covered with the metal wiring such as aluminum becomes possible. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6444895-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6610918-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6759259-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9733297-B2 |
| priorityDate | 1991-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.