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filingDate 1991-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d686ab2fe6063acdd6187a9460e9dcb
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publicationDate 1993-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H05129231-A
titleOfInvention Electrode wiring
abstract (57) [Abstract] [Purpose] Highly reliable electrode wiring of refractory metal or low resistance metal using a tungsten nitride film as an adhesive layer or a barrier layer. [Structure] A tungsten nitride film 3 is formed by a low pressure CVD method using WF 6 , NH 3 , and H 2, and a W film 4 is continuously formed by a low pressure CVD method.
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