| abstract |
(57) [Summary] [Purpose] With regard to a black mask of a color filter used in a liquid crystal display panel or the like, an object thereof is to improve pattern accuracy. [Structure] The black masks 21 and 22 for color filters of the glass substrate 2 have a two-layer structure of metal chrome layers 21b and 22a and metal chrome oxide layers 21a and 22b, a two-layer structure of tantalum and tantalum oxide, or aluminum and oxide. It has a two-layer structure of aluminum. The black mask 23 for the color filter of the glass substrate 2 has a three-layer structure in which the metal chrome layer 23b is sandwiched by a pair of metal chrome oxide layers 23a and 23c in the thickness direction, or the tantalum layer is a pair of oxides in the thickness direction. A three-layer structure in which a tantalum layer is sandwiched or an aluminum layer is sandwiched in a thickness direction between a pair of aluminum oxide layers is formed. The black mask 24 for the color filter of the glass substrate 2 After removing the unnecessary portion of the metal chromium film, the tantalum film, or the aluminum film, the exposed surface associated with the removal is subjected to an oxidation treatment to be formed. |