abstract |
(57) [Summary] [Purpose] Not chemically sensitive and easy to handle, Also, to provide an alkyl metal compound suitable for depositing a metal from a liquid phase or a solid phase. [Structure] Elemental Al, which is doubly and intramolecularly stabilized, Organometallic compounds of Ga and In, which are used to make thin films and epitaxial layers by precipitation from liquid or solid phases. |