http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05121396-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate | 1991-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b344ebda833f35c456ad3dc1709a6f51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f36a0cf9a71f30c5493deb32d6bded6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60df2bdbe95997d5a6961c5952fd207c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad5e06ba6a22ca06d6433a04d82924fe |
| publicationDate | 1993-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05121396-A |
| titleOfInvention | Composition for semiconductor device and interlayer insulating film for semiconductor multi-layer wiring and / or surface protective film |
| abstract | (57) [Summary] [Structure] A fluorine-containing polyimide containing a structural unit represented by the following chemical formula 1 [general formula (I)], for example, 1,3-diamino-5- (perfluorononenyloxy) benzene. A semiconductor device comprising a polyimide obtained by a reaction of 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride as an interlayer insulating film and / or a surface protective film for a semiconductor multilayer wiring. [Chemical 1] [However, in the general formula (I), R is a tetravalent residue of a tetracarboxylic acid dianhydride, Rf is -C n F 2n-1 (where, n represents 6 Is an integer of ˜12), and hydrogen of the benzene ring may be substituted]. [Effect] The above semiconductor device has an excellent moisture resistance and has an interlayer insulating film and / or a surface protective film having a low dielectric constant. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008105551-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002069182-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007176805-A |
| priorityDate | 1991-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 441.