http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05107558-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 1991-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2034d70571284d0f65602b1ec4d8cf88 |
| publicationDate | 1993-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05107558-A |
| titleOfInvention | Active matrix substrate and method of manufacturing active matrix substrate |
| abstract | (57) [Summary] [Object] To provide an active matrix substrate in which a driving circuit having excellent electrical characteristics is formed over an insulating substrate by laser irradiation and wiring short-circuiting is few, and a manufacturing method thereof. [Structure] Drive circuits are divided and arranged alternately on an insulating substrate so as to be included in the size of a pulse laser beam. The silicon thin film is crystallized by laser irradiation so that the edge portion of the beam exists outside the integrated circuit. A drive circuit is formed from this crystallized silicon thin film. Further, the gate electrode and the scanning line are anodized to prevent a short circuit. [Effect] Since it is possible to prevent nonuniformity of the silicon thin film due to laser beam irradiation, it is possible to form an active matrix substrate in which a drive circuit having excellent electrical characteristics is incorporated on a glass substrate having a low distortion temperature. it can. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004054168-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101022619-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7459355-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100362398-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005010606-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7027022-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7015057-B2 |
| priorityDate | 1991-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.