http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05105581-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B19-06 |
filingDate | 1991-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b99706944756694bec0c71639ec27f8e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_136797f51911b352e7e4faec35e9e743 |
publicationDate | 1993-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H05105581-A |
titleOfInvention | Liquid phase epitaxial crystal growth equipment |
abstract | (57) [Summary] [Object] It is an object of the present invention to provide a liquid phase epitaxial crystal growth apparatus that realizes reduction in size increase of the entire apparatus, thereby reducing apparatus cost and running cost. To do. [Structure] The present invention relates to a substrate laying portion 10 of a slider 8. It is characterized in that the front side in the sliding direction (arrow x) is divided into shorter sections in the length direction and is constituted by a plurality of sections 8 '. |
priorityDate | 1991-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 191.