http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0485845-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 1990-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da3d713a034fad93a7aa2a1f4cf44d8a |
| publicationDate | 1992-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0485845-A |
| titleOfInvention | Inspecting method of semiconductor device |
| abstract | PURPOSE: To realize an inspecting method requiring no mechanical contact in which electrical conduction is established stably by applying a conductive paste or liquid on the electrode pad of a semiconductor device and then placing the conductive paste or liquid between the electrode pad and a probe. n CONSTITUTION: A paste kneaded with metallic fibers or metallic particles, liquid metal such as mercury or electrolyte thereof can be employed as a conductive material 3. When such conductive material is employed, electrical connection can be made between a probe and an electrode pad without requiring mechanical contact. Although a slight fluctuation δ is inevitable in the height at the tip of the probe, a good connection is realized so long as the fluctuation δ is sufficiently smaller than the thickness (t) of the conductive material applied on the electrode pad. n COPYRIGHT: (C)1992,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017116266-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022230250-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009295707-A |
| priorityDate | 1990-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23931 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556032 |
Total number of triples: 17.