http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0469947-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1990-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec716da6eb613d9df3890a74e3a629eb |
| publicationDate | 1992-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0469947-A |
| titleOfInvention | Probing apparatus |
| abstract | PURPOSE: To observe a state of a probing apparatus being contacted with electrode pads of a device to be measured, and to perform an alignment accurately, by providing unformed portions of conductor patterns in at least a part of a probe section so that portions of electrodes can be observed. n CONSTITUTION: Portions 6 (unformed portions) of conductor patterns 5 being not formed, each of which is a rectangular portion being 1/2-1/4 of a comb tooth 4a in width, are provided in at least the one tooth of the comb teeth 4a of a probe section 3, e.g. in the two teeth 4a of both the side ends of the probe section 3. An electrical inspection is performed by contacting the conductor patterns 5 of the pointed ends of the probe section 3 with electrode pads 21 of an IC formed on a wafer 20. At this time, a base board 1 for the probe section is aligned with the electrode pads 21 of the IC. In this case, by the unformed portions 6 of the conductor patterns 5 of the two teeth 4a in both the side ends of the base board 1 for the probe section, portions (end portions) of the electrode pads 21 can be observed from above, using a microscope, etc., via transparent quartz plates 2. Therefore, the base board 1 for the probe section can be aligned with the electrode pads 21 easily and surely. n COPYRIGHT: (C)1992,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220029944-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004198352-A |
| priorityDate | 1990-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 |
Total number of triples: 16.