http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0467643-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e80d21c729aa6ff53bc0452132800c04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1990-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c104a518a4c04ccec87f942c2ccbb3f8 |
| publicationDate | 1992-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0467643-A |
| titleOfInvention | Semiconductor integrated circuit |
| abstract | PURPOSE: To make it possible to know the good or bad of semiconductor chips or the values of the characteristics of the chips without inflicting damage on the integrated circuits of the chips by a method wherein a mark formed with the result of a probing inspection of the integrated circuit of each chip by a laser marking is provided on one part of each chip, which is formed on a semiconductor substrate and has each integrated circuit. n CONSTITUTION: Semiconductor chips 2 with each integrated circuit formed thereon and a marking layer 3, which is provided on one part of each semiconductor chip and consists of a metal layer or a polycrystalline silicon layer, are provided on a silicon substrate 1 to constitute a semiconductor wafer, a probing inspection of the integrated circuit of each chip 2 is made, a mark 4 formed with the result of the probing inspection on each marking layer 3 by a laser marking is provided and the result of the classification of the grades of the good or bad of the chips 2 or the characteristics of the chips 2 can be known by the patterned marks 4. n COPYRIGHT: (C)1992,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8691369-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006019118-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006019118-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8643177-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7871899-B2 |
| priorityDate | 1990-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 18.