http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0465142-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1990-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_569c3dfc8ce0ade3bdcd782f8a3c5cae |
| publicationDate | 1992-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0465142-A |
| titleOfInvention | Manufacture of semiconductor element |
| abstract | PURPOSE: To judge whether a semiconductor element is good or not without touching an electrode part inside the semiconductor element by constituting that an electrode which is equal to the electrode inside the semiconductor element is arranged in a separation region of the semiconductor element. n CONSTITUTION: A semiconductor-element circuit part 2 is formed on a silicon wafer 1; and after that, an insulator 3 for electrical isolation use is formed between electrode parts 4 and the semiconductor-element circuit part 2. The insulator 3 is extended up to a separation region 5 of a semiconductor element. After the insulator 3 is formed, the electrode parts 4 are formed. At this time, the electrode parts 4 are extended up to the region 5 and have a structure which is equal to electrode parts 4 formed inside the semiconductor element. In this state, it is judged whether the semiconductor element is good or not by using the electrode parts 4 arranged in the region 5. n COPYRIGHT: (C)1992,JPO&Japio |
| priorityDate | 1990-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 14.