http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0442553-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
filingDate | 1990-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a20ab9a15aa6a1c0737d52e7420cb3e |
publicationDate | 1992-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H0442553-A |
titleOfInvention | Semiconductor device |
abstract | PURPOSE: To obtain a transistor of test pattern enabling accurate measurement of threshold characteristics, in case that a plasma nitride or plasma nitride and oxide film are formed as the final protection film, by providing a structure in which a gate electrode and a third region are electrically connected. n CONSTITUTION: The numeral 7 denotes a P type diffused layer formed within an N type well as a second region, namely a third region having a second conductivity type formed within the second region. The numeral 12 denotes a wiring for electrically connecting a wiring for a gate electrode 8 and a wiring for the P type diffused layer 7 formed within the N type well as the second region 3. This structure is provided within a transistor of test pattern for confirming the basic characteristic. Thereby, even when a plasma nitride is formed or a double-structured layer of an oxide film and plasma nitride is formed as the final protection film, such characteristic irregularity that a threshold voltage of a transistor of the P channel becomes high for the target value but that of the N channel becomes low and fluctuation becomes large can be prevented perfectly. n COPYRIGHT: (C)1992,JPO&Japio |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100249074-B1 |
priorityDate | 1990-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069 |
Total number of triples: 12.