http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04295092-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_460c2d3884b7724541bf93de2a201dfd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02 |
| filingDate | 1991-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_011b549dbf794e7316eeec86d7afece9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f31a6bc20897d59f156f663683b562a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cee3e92b3a7002a7fbee7d540a004acf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94032e8d34fd56fa959fad07b9bc4a44 |
| publicationDate | 1992-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04295092-A |
| titleOfInvention | Apparatus for producing diamond film and method therefor |
| abstract | PURPOSE: To synthesize a high-quality diamond film with high efficiency. n CONSTITUTION: A gaseous mixture composed of gaseous methane and gaseous hydrogen is introduced from a gaseous carbon source introducing port 19 to an arc discharge generated between a bar-shaped electrode 7 and a cylindrical electrode 10 to form gaseous plasma. This gaseous plasma is blown as a plasma jet to a substrate 2 by throttling a plasma ejection port 18. A power source 21 for plasma current is impressed between the annular positive electrode 31 and the bar-shaped electrode 7 with the potential on the annular positive electrode side as a positive potential. Then, electrons flow into the plasma and hydrogen and hydrocarbon are easily dissociated, by which the high-purity diamond film is deposited and formed at a high speed. The current to be passed in the plasma is specified to ≥20A, by which the cracking rate of the gas near the substrate is sufficiently increased and the rising of the substrate temp. is obviated even if the annular positive electrode 31 is not brought near to the substrate 2. n COPYRIGHT: (C)1992,JPO&Japio |
| priorityDate | 1991-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.