http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04286140-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
filingDate | 1991-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7206369d687552610eee87325e8bc1b4 |
publicationDate | 1992-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H04286140-A |
titleOfInvention | Manufacture of semiconductor device |
abstract | PURPOSE: To conduct a marking of a defective chip in a wafer decided to be defective in a probe test and to easily recognize a mark in a method of marking the defective chip. n CONSTITUTION: An indicator pad 4 to be isolated from a circuit and discolored by energizing is provided on each chip 1 in a wafer, and the pad 4 of the chip 1 decided to be defective in a probe test is discolored by energizing to mark the defective chip. Magnesium is used as a material of the pad 4. n COPYRIGHT: (C)1992,JPO&Japio |
priorityDate | 1991-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559552 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5462224 |
Total number of triples: 13.