http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0426137-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_655664639c70f85c31e4ff0ee791e12e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1990-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5be69cf3de7f5d9d4ee74b8f15fd2e0 |
| publicationDate | 1992-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0426137-A |
| titleOfInvention | Semiconductor inspecting device |
| abstract | PURPOSE: To shorten a cooling time by disposing a window plate made of an infrared ray transmission material at an opposite wafer side from a wafer supporting plate, forming a cooling space between the supporting plate and the window plate, and introducing vapor of cooling liquid to the space. n CONSTITUTION: And annular part 6 of a chuck base 3 is cooled by liquid nitrogen N in a cooling vessel 10, and the base 3, a wafer supporting plate 7 and a wafer W are cooled by thermal conduction. The nitrogen N is slightly raised under pressure due to evaporated nitrogen in a vapor supply space 18 formed between the outer periphery of the base 3 and a partition wall 17, the vapor is introduced from a gas passage 15 provided in the base 3 into a cooling space 9 by the pressure, and then the vapor is externally discharged from the space 9 through a gas discharge passage 16 as a nitrogen vapor flow. An infrared light is emitted from below a trestle 1 toward upward in a state that the plate 7 is cooled from the rear surface with the vapor, a probe card is brought into contact with the wafer W to be inspected. Thus, a wafer cooling time can be shortened to improve the inspecting efficiency. n COPYRIGHT: (C)1992,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006184177-A |
| priorityDate | 1990-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 |
Total number of triples: 14.