| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 |
| filingDate |
1990-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbbc98445cb336653fc20f7620a5ddc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_608ef9ad692a093fe15d432c4e01fc9f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d538d31aabc6d2b5a9e5f13a7f4c224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9effe4e83dca4eab243a16d1f8362cf |
| publicationDate |
1992-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H04225818-A |
| titleOfInvention |
Method for treating waste gas |
| abstract |
PURPOSE: To make nitrogen trifluoride- and/or active fluorides-containing gas harmless. n CONSTITUTION: The gas is brought into contact with silicon nitride at temperatures not lower than 200°C and after that, is washed with aqueous alkali. Waste gas which does not substantially include nitrogen trifluoride and/or active fluorides is obtained. n COPYRIGHT: (C)1992,JPO&Japio |
| priorityDate |
1990-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |