| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5736c85c1929ce4e9775e836a65d6c05 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B29-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-16 |
| filingDate |
1990-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_772cac30adbf54bf7569851fab7616c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5fe7693cb45f30a3be4e4f9138aef8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_920ab8091a834db11ecc3418a5937893 |
| publicationDate |
1992-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H04219317-A |
| titleOfInvention |
Production of titanium oxide thin film |
| abstract |
PURPOSE: To form a titanium oxide thin film having uniform crystallinity on a substrate at a low temperature by reacting a titanium halide gas with oxygen gas in a plasma generated by high-frequency electric discharge. n CONSTITUTION: Gas of a titanium halide (e.g. titanium tetrachloride) is made to react with oxygen gas in a plasma generated by high-frequency electric discharge to form a titanium oxide thin film on a substrate made of single crystal of magnesium oxide. A titanium oxide thin film having uniform crystallinity can be formed on the substrate at a low temperature by this process. n COPYRIGHT: (C)1992,JPO&Japio |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0866635-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002009355-A |
| priorityDate |
1990-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |