http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04194654-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N25-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-06 |
| filingDate | 1990-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fdf47b256b6e37264d6004d940285bb |
| publicationDate | 1992-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04194654-A |
| titleOfInvention | Method for calibrating temperature of substrate in growth of mbe crystal |
| abstract | PURPOSE: To accurately detect the m.p. of the metal bonded to a substrate holder under pressure, in calibrating the temp. of a substrate on the basis of the m.p. of the metal bonded to the substrate holder under pressure in the growth of an MBE crystal, by monitoring the vacuum degree generated at the time of the melting of the metal. n CONSTITUTION: Sn bonded to a substrate molybdenum holder under pressure is introduced into an MBE growing chamber to be held under vacuum of about 10 -9 . Next, the output temp. of the thermocouple brought into contact with the rear of the holder is monitored and gradually raised. In this case, the fine change of the degree of vacuum in the growing chamber can be detected by recording the output voltage of an ionizing vacuum meter on a chart recorder. Therefore, this change point is set to the theoretical m.p. of Sn to calibrate the temp. of a substrate. n COPYRIGHT: (C)1992,JPO&Japio |
| priorityDate | 1990-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419405613 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23932 |
Total number of triples: 15.