http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04182388-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_af17c491906d7d677939f7f2c2f7d157 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 |
| filingDate | 1990-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_863541265914e77032085634b3452f58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9ca5762616fd7e8853fb7ab177bc2f2 |
| publicationDate | 1992-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04182388-A |
| titleOfInvention | Synthesis of diamond |
| abstract | PURPOSE: To improve the film formation rate by synthesizing the film while irradiating the substrate with UV ray. n CONSTITUTION: In a reaction chamber 1 in specified vacuum state, plasma is generated by ECR plasma CVD method by generating a magnetic field with an exciting coil 5 to satisfy the ECR conditions and supplying microwave from a microwave generator 3. Then the surface 9a of a substrate 9 heated at specified temp. is irradiated with UV ray 6a from a light source 6 such as deuterium lamp, while supplying a mixture gas of O 2 gas and carbon-contg. compd. gas 2 such as methane at a specified flow rate. By the irradiation of UV ray 6a, the surface 9a of substrate 9 is purified, and a diamond film of uniform thickness is formed on the surface 9a of substrate 9 by the plasma excitation in the reaction chamber 1. n COPYRIGHT: (C)1992,JPO&Japio |
| priorityDate | 1990-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.