http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04167400-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d92e31d7a888e78c621c7604a7f2969f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01P1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 1990-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95e24403d7cf68f6806fa69769f7fda2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88402ae4cf75b6cb29922ddd4086bd42 |
| publicationDate | 1992-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04167400-A |
| titleOfInvention | Plasma generating device |
| abstract | PURPOSE: To generate whisler waves or helicon waves capable of matching to various impedance by connecting each voltage part with a shifted phase to each electrode while setting a certain distance between specific electrodes. n CONSTITUTION: Each of cylindrical bodies 2, 3 on and under a plasma chamber 1 is made as one unit, and plasma is generated in the cylindrical body 2 surrounded by a frame antenna 4. High frequency waves radiated from the frame antenna are combined in whistler state or helicon state through magnetic field of plasma 10, and energy is transferred to a center part of the plasma 10. The plasma 10 is diffused from the cylindrical body 2 to 3, and guided through solenoid coils 11, 12. In this case, electrodes 32-35 are positioned with a distance d from electrodes 28-31 and also connected to voltage parts U1, U2 with shifted phases. The electrodes 28-31 rotate against the electrode 32-35. n COPYRIGHT: (C)1992,JPO |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006524422-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011071121-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014132570-A |
| priorityDate | 1989-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 |
Total number of triples: 23.