http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04133444-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1990-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11cf501fe5aa927236b98eb599cff700 |
| publicationDate | 1992-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04133444-A |
| titleOfInvention | Low-temperature handling device for ic |
| abstract | PURPOSE: To obtain a device, which is capable of enabling an operator to work safely without endangering him in the state of oxygen deficiency by exhaust of N 2 to the outside by a method wherein the device is constituted into one provided with the reduction weight instrument of a liquid nitrogen bomb, an atmospheric temperature instrument on the periphery of a handler main body, an arithmetic device, an alarm generator and valve devices. n CONSTITUTION: The title device is constituted into one provided with a reduction weight instrument 8 of a liquid nitrogen bomb 20, an atmospheric temperature instrument 7 on the periphery of a handler main body 1, an arithmetic device 4 for operating the measured values measured by those instruments 8 and 7, a device 6, which generates an alarm on the basis of a command signal from the device 4 in the case where a nitrogen concentration in the chamber exceeds a reference value, and valve devices 9 and 10 for stopping temporarily a supply of liquid nitrogen. For example, temperature data 18 is inputted in the arithmetic part 4 from the external temperature measuring meter 7 and bomb weight data 19 is inputted in the arithmetic part 4 from the bomb weight meter 8. On the other hand, each setpoint, such as a time interval, during which an operation is executed by the arithmetic part, he consumption of N 2 per unit time, which is regarded as an upper limit for generating the alarm, the consumption of the N 2 per unit time, which is regarded as an upper limit for stopping temporarily the supply of the N 2 and the like, is previously inputted in a setpoint input part 11. n COPYRIGHT: (C)1992,JPO&Japio |
| priorityDate | 1990-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.