http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04128646-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b30aaab6b2cd23887e078e5c256e027 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 1990-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89607af8c2e1acb56a8d58f6050002f6 |
| publicationDate | 1992-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04128646-A |
| titleOfInvention | Laminated electrode for sensor |
| abstract | PURPOSE: To obtain a laminated electrode for a sensor excellent in an environmental resistance by using a high-melting point metal to the lower layer of the laminated electrode, and forming a film on an insulating substrate on which a positive-type photo-resist pattern has been formed, by means of the vacuum evaporation method, and similarly by forming the upper layer using Pt, and forming the laminated electrode by means of the lift-off method. n CONSTITUTION: After a positive-type photo-resist pattern has been formed on a glass substrate, high-melting point metal Cr is deposited by means of the vacuum evaporation method, and in succession, similarly, Pt is deposited, and a pair of opposite comb-type electrodes are formed by means of the lift-off method. This comb-type electrodes are put in a plasma reaction vessel, and after the inside of the vessel has been evacuated, methylene dibromide and tetramethylethylenediamine are introduced, and they are subjected to a high-frequency discharge to form a sensitive wet film consisting of a plasma-polymerized film of these mixture. Then, the vessel is again evacuated, and methyltrimethoxysilane is introduced and is subjected to a high-frequency discharge to form a protective film consisting of the plasma-polymerized film. n COPYRIGHT: (C)1992,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07198646-A |
| priorityDate | 1990-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.