http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03286544-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1990-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f91cd9703bdfdd6022e7c70bcac6c7b1 |
| publicationDate | 1991-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H03286544-A |
| titleOfInvention | Probe device |
| abstract | PURPOSE: To enable a problem of dew-forming on a wafer after inspection under a low temperature to be solved and productivity in a semiconductor production process to be improved by allowing a carrier stage part to have a cover which practically enables a probe device to be enclosed airtight, providing a lock mechanism for prohibiting open operation of the cover, and by enabling the lock mechanism to cancel the lock mechanism based on signal from a sensor which detects temperature within the cover. n CONSTITUTION: Wafers 4 within a carrier 5 are taken out one by one and are carried to an inspection part 3 for inspection. The wafers 4 are returned after inspection to the original carrier 5 again in order. The finally inspected wafer 4 returns to the carrier 5, signal from a temperature sensor 9 is transmitted to a control part when a carrier stage part is lifted, a preset value a signal value are compared, a lock mechanism 7 is driven when the signal value reaches a set value or less, thus canceling lock operation. At the same time, a display lamp lights up, an operator opens a cover 6, and then he moves the carrier 5 to a next process. Even if the cover 6 is opened, the temperature is controlled so that all wafers 4 within the carrier 5 do not form dew at a humidity of a clean room, thus preventing water drop from being adhered to the wafer 4. n COPYRIGHT: (C)1991,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100735744-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5910727-A |
| priorityDate | 1990-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 15.