http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03286543-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_12d24c0a12c3ecdb6d9a47d623d96e76 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1990-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34d51297d6c9043b1e062530e73b50bd |
| publicationDate | 1991-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H03286543-A |
| titleOfInvention | Probe for test of semiconductor integrated circuit device |
| abstract | PURPOSE: To enable characteristic test to be performed regardless of a narrow electrode which is approximately 50μm by embedding a plurality of probes consisting of a conductive material with a specific diameter length into an insulated support substrate. n CONSTITUTION: A diameter of a probe 1 consisting of a conductive material such as a metal (tungsten, palladium, etc.) is 50μm or less and is buried at an insulated support substrate 2 made of, for example, resin. These probes 1 are connected to measuring device by a lead 3. A thickness (d) of the insulated support substrate 2 should normally be approximately 4-5mm since it needs to withstand the pressure which is applied to a probe for test for allowing the probe and an electrode to contact fully. Also, assuming that this insulated support substrate 2 is a transparent resin, it is convenient since it is possible to inspect an alignment between the probe and the electrode visually from above when performing characteristic test. On principles, if the diameter of the probe is 50μm or less, measurement can be made without mutual contact to perform characteristic test of a semiconductor integrated circuit device where an interval between the electrodes is 50μm without any contact. However, it is more desirable that the diameter is 20-30μm. n COPYRIGHT: (C)1991,JPO&Japio |
| priorityDate | 1990-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.