http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03253052-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1990-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ffca5042838004102e770cc5027170e |
| publicationDate | 1991-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H03253052-A |
| titleOfInvention | Cooling method for testing electronic parts |
| abstract | PURPOSE: To easily bring a probe into contact with a pad to be inspected and, at the same time, to monitor the probing state through a monitor by jetting a low temperature insulating liquid upon LSI instead of providing a cooling fin and, at the same time, providing an endoscope. n CONSTITUTION: Since LSI elements 5 of an LSI element group 6 mounted on an LSI package 1 produce heat when electricity is supplied to the elements 5, each pipe of a nozzle 7 is faced to each element 5 so as to jet a sufficiently cooled insulating liquid 8 upon the upper surface of each element 5. The liquid 8 jetted from the nozzle 7 is made to flow over notches provided at upper sections of two sides facing each other of a water tank 9 so that the liquid in the tank 9 can be maintained at a constant level. In addition, a probe block 3 and spring probe 4 which are completely sealed with an epoxy resin, etc., are provided in the tank 9 and tests are carried out by means of the block 3 and probe 4. When a defective element 5 is found, the pad 11 to be inspected in the vicinity of the element 5 is probed so as to analyze the cause of the defect. n COPYRIGHT: (C)1991,JPO&Japio |
| priorityDate | 1990-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 14.