http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03243772-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9c84a665c3d5fa92278c65f2091dc5be |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
| filingDate | 1990-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b9bbb5278d695aa38a631031c84248d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05cd1391fd92e2eaa49c927a7fba480e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_097be116e5dae61d44b421f88d2ef092 |
| publicationDate | 1991-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H03243772-A |
| titleOfInvention | Formation of metal nitride coating film |
| abstract | PURPOSE: To improve the film hardness and its adhesion to a substrate in the plasma CVD method using gaseous ammonia as an N source by obtaining the optimum supply power value form the relation between the emitted light intensity of NH radical and supply power to an electrode. n CONSTITUTION: A raw gas consisting of gaseous metal halide, gaseous ammonia and gaseous hydrogen is supplied into a vacuum chamber, a power is impressed on the electrode in the chamber to produce plasma in the chamber, and a metal nitride coating film is formed on the surface of a substrate. In this case, the relation between the emitted light intensity of NH radical and impressed power in the plasma space is previously measured, and the impressed power value P 0 at which the emitted light intensity is maximized is obtained. The impressed power value P to the electrode when the film is formed is controlled to 0.90P to 1.05P, and other conditions are set to the conditions when the P 0 is obtained. n COPYRIGHT: (C)1991,JPO&Japio |
| priorityDate | 1990-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.