abstract |
PURPOSE: To prepare the title compsn. offering an excellent adhesion to copper and an excellent resist pattern by compounding a specific thermoplastic polymer, a specific addition-polymerizable compd., and a photopolymn. initiator. n CONSTITUTION: A photopolymerizable compsn. comprising a thermoplastic polymer having a polycaprolactone side chain and pref. comprising a copolymer consisting of a monomer of formula I (wherein R 1 to R 7 are each H or alkyl; and (n) is 1-5) having a polycaprolactone structure and a vinyl monomer of formula II (wherein R 8 to R 11 are each H, halogen, or an alkyl, arom, ring, alkylester, or carboxyl group); an addition-polymerizable compd. which is solid or liq. at normal temp. and pressure (e.g. trimethylolpropane triacrylate); and a photopolymn. initiator (e.g. 2,4-diethylthioxanthone). n COPYRIGHT: (C)1991,JPO&Japio |