http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03119742-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0624488fd2eb189092560fd8b469dee5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67778 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67271 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1990-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9761e84b719fe76a5d5c5396ea9b7b06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_174f95981337fa5e75ea48e39960ae21 |
| publicationDate | 1991-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H03119742-A |
| titleOfInvention | Method and station for processing sample |
| abstract | PURPOSE: To make compact a sample station by an arrangement wherein a sample is stored, transferred and supported in substantially vertical arranging direction and processed selectiveiy. n CONSTITUTION: A wafer 34 held vertically in a storage cassette 26 is sucked to, a paddle 74a of a paddle structure 72 and located oppositely to a central vacuum chuck 82 mounted on the frame 70 of a wafer processor 28. When a vacuum pressure is imparted to the chuck 82, the wafer 34 is secured in the direction vertical to the frame 70. The frame 70 turns 360° in order to scan the water 34 optically and determines the central position and the flat of the wafer 34. When the central position is determined, the paddle 74a sucks the wafer 34 and secures the wafer 34 at a specified position in the direction vertical to an X-Y conversion stage 30. An operator inputs an instruction on a keyboard and shifts an appropriate region of the wafer 34 into the field of view of an objective lens 30 using the stage 30 before inspecting the wafer 34. n COPYRIGHT: (C)1991,JPO |
| priorityDate | 1989-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 19.