http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03105940-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e80d21c729aa6ff53bc0452132800c04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1989-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33b4147fe3d5c7ac89b18dff6182c4c2 |
| publicationDate | 1991-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H03105940-A |
| titleOfInvention | Probing device for wafer |
| abstract | PURPOSE: To brush the needle of a probing card by installing ceramics for polishing a needle point at the central upper section of a Z stage and mounting a brush for brushing in the X or Y direction of the Z stage. n CONSTITUTION: A Z stage 1 has ceramics 2 for polishing a needle point at a central upper section thereof, and has a brush 3 for brushing at the X or Y directional end thereof. The number of wafers set by a measuring-number housing register is measured during normal measurement, the Z stage 1 is operated in the θ direction under the state in which the Z stage 1 is lifted, the needle of a probing card is polished by the ceramics 2 for polishing the needle point, the Z stage 1 is lowered, and moved in the X direction or the Y direction and elevated again, the needle of the probing card is brushed by the brush 3 for brushing, adhering aluminum is removed and the oxidized needle point is polished, and operation is returned to normal measurement again. n COPYRIGHT: (C)1991,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6306187-B1 |
| priorityDate | 1989-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 |
Total number of triples: 14.