http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0293461-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1988-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45ce6b95111e8dfb0b0b6b448383ff07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be2e0e68ab22016ff079948c68391600 |
| publicationDate | 1990-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0293461-A |
| titleOfInvention | Pattern forming method |
| abstract | PURPOSE: To prevent the size shift of resist patterns by forming a photoresist film via a photocolor developing film on a substrate having steps and a high reflectivity. n CONSTITUTION: An Al film 32 having the high reflectivity is deposited on the Si substrate 30 having the steps. The photocolor developing material which induces a color development effect by light of the prescribed wavelength to be exposed thereto (e.g. orthonitroaniline) and a binder (e.g. polyvinyl alcohol) is applied on a film 32 to form the photocolor developing film 34. A film 36 consisting of the positive type photoresist which reacts with the light of the above-mentioned wavelength is laminated thereon. The light past transparent parts 40 of the mask reacts with the film 36 when the resist is exposed through the photomask in succession of the above lamination. The excess light is then absorbed in the film 34 and develops a color. The unnecessary parts of the film 34 are removed as well if the film 36 is developed thereafter. n COPYRIGHT: (C)1990,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003005345-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4675504-B2 |
| priorityDate | 1988-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517244 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6946 |
Total number of triples: 16.