http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0249011-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95a96b55d0c0f59d15bac7092248f7ad |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14 |
| filingDate | 1988-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a54053545977dc254a70f01de653ac6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17bb6d768bcd843fa7ae39a9507729d2 |
| publicationDate | 1990-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0249011-A |
| titleOfInvention | Resist for processing with high energy beam |
| abstract | PURPOSE: To obtain the title resist consisting of an aromatic vinyl monomer component and vinyl monomer component having chlorine-substituted benzoic acid residue at side chain, having sufficient sensitivity to high energy beams and improved in resolving properties. n CONSTITUTION: The aimed resist consisting of a copolymer of (A) 94-98mol% aromatic vinyl monomer component (e.g., styrene) and (B) 6-2mol% vinyl monomer having a chlorine substituted benzoic acid residue expressed by the formula (Cl is bonded at o-position or p-position) at side chain. Furthermore, the component B includes e.g., a compound obtained by linking a O- or P-chlorobenzoic acid residue through an epoxy group to an epoxy group-containing vinyl monomer such as glycidyl methacrylate. n COPYRIGHT: (C)1990,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0786233-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5095076-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5589978-A |
| priorityDate | 1988-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.