http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0240363-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D223-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D295-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D211-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D207-263 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D225-02 |
| filingDate | 1988-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f81bb258a2f185e63beab7fc54bc312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_077ad8e8538ed1f552971679bd70d542 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52164c6787db31780afd7526795e868a |
| publicationDate | 1990-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0240363-A |
| titleOfInvention | Novel 1,2-quinone diazide compound |
| abstract | NEW MATERIAL:The 1,2-qinonediazide compound of formula I (Ra is H, halogen or 1-4C alkyl; when m is ≤3, the plural Ra groups may be different atoms or groups; D is 1,2-naphthoquinonediazido-4-sulfonyl, 1,2-naphthoquinonediazido-5- sulfonyl or 1,2-benzoquinonediazido-4-sulfonyl; m is 1-5; n is integer of 1 to m; X is methylene or carbonyl; l is 3-10). n USE: Useful as a synthetic raw material for alkali-soluble resin and positive-type photoresist. The photoresist has high sensitivity, resolution, heat-resistance and process stability and is suitable for the production of a semiconductor integrated circuit element such as VLSI. n PREPARATION: The compound of formula I can be produce by esterifying the hydroxyl group of the compound of formula II e.g., with 1,2- naphthoquinonediazido-4-sulfonyl chloride. n COPYRIGHT: (C)1990,JPO&Japio |
| priorityDate | 1988-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.