http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02260440-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1989-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a20297d60a16f9e4e0459192a0b0a3d6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58249741bd924cd6e675469b70d992da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_490cda427c1c432339db468fb7b7449f |
| publicationDate | 1990-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H02260440-A |
| titleOfInvention | Ic wafer and discrimination of quality of ic |
| abstract | PURPOSE: To efficiently control an IC at each wafer as a unit by a method wherein a quality indication part of an individual IC formed on an IC wafer is formed in one section of the IC wafer. n CONSTITUTION: In a process to form individual IC's 2 of an IC wafer 1, an IC arrangement map 4 is formed in a quality indication part 3. When the IC's 2 are completed, an electrical characteristic of the formed IC's 2 is inspected and their quality is detected. Inspected results are stored one after another in a control part of an inspection apparatus. Parts corresponding to a defective IC 2 on the IC arrangement map 4 are irradiated with a laser beam. An aluminum film in the parts is evaporated and markings 5 are formed. Thereby, it is possible to discriminate collectively whether the individual IC's 2 of the IC wafer 1 are good or bad. The individual IC can be controlled at the IC wafer as a unit and a posterior process can be executed efficiently. n COPYRIGHT: (C)1990,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05190614-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05144891-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0997820-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0837210-A |
| priorityDate | 1989-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 |
Total number of triples: 20.