http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02238356-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cfa11ef6f0c5577b4612b415ff30253 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 |
| filingDate | 1989-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dc057279d3e8468167cee0f7dd81882 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_222d42faa62d8ff69ff6aa18a6e0de9b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31e222e640d7cc98a1cc67cdc69c812e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f440a6b1fb63baf4bbec31a46c79c313 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e44aa1e767304079d9aff274dc4ea061 |
| publicationDate | 1990-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H02238356-A |
| titleOfInvention | Method for judging semiconductor single crystal ingot |
| abstract | PURPOSE: To improve the yield rate of an ingot by transmitting an ultrasonic wave through the cross section of the ingot, obtaining CT data, performing the same method for a good ingot, subtracting the CT data, comparing the propagating time and the like, and judging whether the values are within allowance ranges. n CONSTITUTION: A silicon single crystal ingot 1 is inserted between a probe 2a and a wave receiver 2b. An ultrasonic wave is made to pass, and the CT image data of the respective propagating times are formed. The CT image data of the propagating time or the propagating speed of the ultrasonic wave through the cross section of an ingot which is judged as good are obtained. The CT image data are subtracted from the CT image data of the desired cross section of the ingot to be measured. The CT image of the relative propagation time or propagating speed of the ultrasonic wave through the desired cross section is obtained. The quality can be judged based on whether the distribution of the relative times or speeds is within an arbitrarily set allowance ranges. n COPYRIGHT: (C)1990,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009121977-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010175560-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005195594-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012526275-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8038895-B2 |
| priorityDate | 1989-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 21.