http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02218145-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a6a69da5879eb83f56f6876dba3e3cf |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-732 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-73 |
| filingDate | 1989-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b537e4b8ebe68edab4877ace2109d490 |
| publicationDate | 1990-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H02218145-A |
| titleOfInvention | Semiconductor device |
| abstract | PURPOSE: To check the operation of a device without deteriorating production efficiency by forming a monitoring element for checking the operation at the adjacent part of the power-supplied bipolar transistor of a semiconductor integrated circuit. n CONSTITUTION: A monitoring element for checking operation is provided at the adjacent part of the power-supplied bipolar transistor or a semiconductor integrated circuit. At least one place of a diffused layer 7 of the monitoring element is in contact with a dielectric isolation layer 5. A metal wiring layer 14 of the monitoring element is guide out to a checking terminal pad 16. Under the wafer state, leaking currents in the reverse direction in the monitoring element region 7 and a silicon substrate 1 which is short-circuited to a collector region 6 that is the N-type conductivity layer of the vertical bipolar transistor are measured. Thus, whether crystal defects occur or not can be judged on the basis of dielectric isolation. In this way, the operation can be checked without deterioration production efficiency. n COPYRIGHT: (C)1990,JPO&Japio |
| priorityDate | 1989-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 17.