http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02213150-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38520f366e74704305b34fb93a81121e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1989-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5332b9534758ffc9f4b3503a7acb2fa3 |
| publicationDate | 1990-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H02213150-A |
| titleOfInvention | Semiconductor substrate surface temperature measuring wafer |
| abstract | PURPOSE: To arrange a number of thermocouple contacts at minute intervals so as to obtain the one which can measure minute temperature distribution over the whole wafer by providing thermocouple contacts, which are made into wirings with diameters of several microns or less and are overlaid, drawing-out wirings, which are overlaid, etc., on the surface of a semiconductor substrate. n CONSTITUTION: In the device to measure the surface temperature of a semiconductor, a number of thermocouple contacts 35, which are made into wirings with diameters of several micron or less and are overlaid, a number of drawing-out wirings 33 and 34, which are connected to the thermocouples 35 and are overlaid on the surface of the semiconductor substrate 31, a silicon oxide film, which covers the thermocouples 35 and the drawing-out wirings 33 and 34, are arranged on a semiconductor substrate 31, and this is equipped with a connection part, which is formed concentratedly in the vicinity of the semiconductor substrate 31 so as to take out potential signals from said drawing-out wirings 33 and 34 to the outside of the semiconductor substrate 31. For example, a first thermocouple wiring 33 is provided on an oxide film 32, and a second thermocouple wiring 34 is provided so that it may overlap a part of it so as to form the thermocouple contact part 35. n COPYRIGHT: (C)1990,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000059127-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0190710-A1 |
| priorityDate | 1989-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 |
Total number of triples: 15.